Micromachining of passive planar micromixer on poly (methyl methacrylate) substrate with excimer laser ablation
نویسندگان
چکیده
منابع مشابه
Refractive microlenses produced by excimer laser irradiation of poly (methyl methacrylate)
A method has been developed whereby refractive microlenses can be produced in poly (methyl methacrylate) by excimer laser irradiation at λ = 248 nm. The lenses are formed by a combined photochemical and thermal process. The lenses are formed as depressions in the substrate material (negative focal length), which makes replication necessary in order to obtain lenses with a positive focal length....
متن کاملExcimer laser microfabrication and micromachining
Excimer lasers are proving to be highly successful for fabricating industrial components with feature sizes in the range between 0.05–1,000μm (see Fig. 1). As well as providing a 15 year, 5 generation extension to optical lithography as used in the manufacture of silicon chips, excimer lasers are used for microfabricating many of the critical features in a wide variety of the electronic and tel...
متن کاملComputational studies of ultraviolet ablation of poly(methyl methacrylate)
The results from our recent molecular dynamics and electronic calculations studies of the interaction of ultraviolet light with poly(methyl methacrylate) are discussed. Molecular dynamics simulations in the photochemical and photothermal regimes demonstrate the delayed onset of ablation due to the slow pressure relaxation in the polymeric material. Electronic structure calculations show the pos...
متن کاملFemtosecond laser fabrication of tubular waveguides in poly(methyl methacrylate).
Femtosecond laser direct writing is employed for the fabrication of buried tubular waveguides in bulk poly(methyl methacrylate). A novel technique using selective chemical etching is presented to resolve the two-dimensional refractive-index profile of the fabrication structures. End-to-end coupling in the waveguides reveals a near-field intensity distribution that results from the superimpositi...
متن کاملFemtosecond laser induced surface swelling in poly-methyl methacrylate.
We show that surface swelling is the first step in the interaction of a single femtosecond laser pulse with PMMA. This is followed by perforation of the swollen structure and material ejection. The size of the swelling and the perforated hole increases with pulse energy. After certain energy the swelling disappears and the interaction is dominated by the ablated hole. This behaviour is independ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Microsystem Technologies
سال: 2008
ISSN: 0946-7076,1432-1858
DOI: 10.1007/s00542-008-0660-x